Layout and process improvements to double-sided silicon 3D detectors fabricated at FBK

@article{Povoli2012LayoutAP,
  title={Layout and process improvements to double-sided silicon 3D detectors fabricated at FBK},
  author={Marco Povoli and Gian-Franco Dalla Betta and Alvise Bagolini and Maurizio Boscardin and Gabriele Giacomini and Francesca Mattedi and Nicola Zorzi},
  journal={2012 IEEE Nuclear Science Symposium and Medical Imaging Conference Record (NSS/MIC)},
  year={2012},
  pages={1334-1338}
}
In the past few years, very important progress has been made in the development of silicon 3D detectors, passing from the R&D phase with performance demonstration of a few prototypes to an industrialization phase, which led to the first production of 3D sensors to cover 25% of the ATLAS Insertable B-Layer (IBL) staves. Double-side 3D sensor technology developed at FBK (Trento, Italy) in collaboration with INFN proved successful to yield good quality detectors for the IBL. In spite of the good… CONTINUE READING