Lattice strain and tilt mapping in stressed Ge microstructures using X-ray Laue micro-diffraction and rainbow-filtering

@inproceedings{Tardif2016LatticeSA,
  title={Lattice strain and tilt mapping in stressed Ge microstructures using X-ray Laue micro-diffraction and rainbow-filtering},
  author={Samuel Tardif and Alban Gassenq and Kevin Guilloy and Nicolas Pauc and Guilherme Osvaldo Dias and Jean-Michel Hartmann and J. Widiez and Thomas F. Zabel and Esteban Marin and H. J. Sigg and J'erome Faist and Alexei Chelnokov and Vincent Reboud and V A{\'i}da Patricia Calvo and Jean-S'ebastien Micha and Odile Robach and Franccois Rieutord},
  year={2016}
}
  • Samuel Tardif, Alban Gassenq, +14 authors Franccois Rieutord
  • Published 2016
  • Physics, Chemistry
  • Micro-Laue diffraction and simultaneous rainbow-filtered micro-diffraction were used to measure accurately the full strain tensor and the lattice orientation distribution at the sub-micron scale in highly strained, suspended Ge micro-devices. A numerical approach to obtain the full strain tensor from the deviatoric strain measurement alone is also demonstrated and used for faster full strain mapping. We performed the measurements in a series of micro-devices under either uniaxial or biaxial… CONTINUE READING

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