Laterally-driven deformation-robust MEMS gyroscopes with three sets of symmetrically arranged folded-beam suspensions

@article{Degawa12009LaterallydrivenDM,
  title={Laterally-driven deformation-robust MEMS gyroscopes with three sets of symmetrically arranged folded-beam suspensions},
  author={M. Degawa1 and H. W. Jeong and Hozumi Sonobe and Chisaki Takubo and Kiyoko Yamanaka and Yasushi Goto},
  journal={TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2009},
  pages={664-667}
}
Microelectromechanical systems (MEMS) vibratory gyroscopes are used in a wide range of applications. Gyroscopes which have long-term stability and high-reliability even when they are used in harsh environments such as in a wide range of temperatures will be useful for automotive systems and robotics applications. We report a deformation-robust gyroscope, which has three sets of symmetrically arranged folded beams (SAF), which cancel and/or dissipate deformation or internal stress over a wide… CONTINUE READING

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