Laterally Driven Polysilicon Resonant Microstructures

@inproceedings{Tang2004LaterallyDP,
  title={Laterally Driven Polysilicon Resonant Microstructures},
  author={W. C. Tang and T. H. Nguyen and Roger T. Howe},
  year={2004}
}
Interdigitated finger (comb) structures are demonstrated to be effective for electrostatically exciting the resonance of polysilicon microstructures parallel to the plane of the substrate. Linear plates suspended by a folded-cantilever truss and torsional plates suspended by spiral and serpentine springs are fabricated from a 2 Fm-thick phosphorus-doped LPCVD polysilicon film. Resonance is observed visually, with frequencies ranging from 18 kHz to 80 kHz and quality factors from 20 to 130… CONTINUE READING
Highly Cited
This paper has 310 citations. REVIEW CITATIONS
219 Citations
15 References
Similar Papers

Citations

Publications citing this paper.
Showing 1-10 of 219 extracted citations

310 Citations

0102030'02'05'09'13'17
Citations per Year
Semantic Scholar estimates that this publication has 310 citations based on the available data.

See our FAQ for additional information.

References

Publications referenced by this paper.
Showing 1-10 of 15 references

Resonant-structure micromotors," Technical Digesr

  • A. P. Pisano
  • IEEE Micro Electromechanical Systems Workshop…
  • 1989

Determination of Young's modulus of polysilicon using resonant micromechanical beams,

  • D. W. DeRoo
  • M.S. Report, Dept. of Electrical and Computer…
  • 1988

Surface - micromaching processes for electrostatic microactuator fabrication , Tech

  • D. W. Burns
  • 1988

Resonant microsensors," Technical Digest, 4~ International Conference on Solid-state Sensors and Actuators, Tokyo, Japan

  • R. T. Howe
  • June 2-5,
  • 1987

Silicon microengineering for accelerometers,

  • D. C. Satchel, J. C. Greenwood
  • Proc. Inst. of Mech. Eng.,
  • 1987

The resonant gate transistor , 1 EEE Trans

  • W. E. Newell, R. A. Wickstrom, J. R. Davis
  • 1987

h g d o n , "Resonator sensors - a review,

  • R M.
  • J . Phys. E., Sci. fnsf.,
  • 1986

Resonator sensorsreview

  • R. T. Howe
  • J . Phys . E : Sci . Instrum
  • 1985

Similar Papers

Loading similar papers…