Laterally Driven Polysilicon Resonant Microstructures

  title={Laterally Driven Polysilicon Resonant Microstructures},
  author={W. C. Tang and T. H. Nguyen and Roger T. Howe},
Interdigitated finger (comb) structures are demonstrated to be effective for electrostatically exciting the resonance of polysilicon microstructures parallel to the plane of the substrate. Linear plates suspended by a folded-cantilever truss and torsional plates suspended by spiral and serpentine springs are fabricated from a 2 Fm-thick phosphorus-doped LPCVD polysilicon film. Resonance is observed visually, with frequencies ranging from 18 kHz to 80 kHz and quality factors from 20 to 130… CONTINUE READING
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