Laser interferometric mapping of smart power ESD protection devices with different blocking capabilities

@article{Bychikhin2001LaserIM,
  title={Laser interferometric mapping of smart power ESD protection devices with different blocking capabilities},
  author={Sergey Bychikhin and Martin Litzenberger and P. Kamvar and Dionyz Pogany and C. Furbock and Erich Gornik and Gerhard Groos and Matthias Stecher},
  journal={31st European Solid-State Device Research Conference},
  year={2001},
  pages={231-234}
}
We study thermal and free carrier distribution during electrostatic discharge (ESD) stress in npnp and anti-serial npn transistor ESD protection devices with different blocking capability. The thermal energy and free carrier distribution is studied using the measurements of temperatureand free carrier-induced optical phase shift. The dominant heat source in… CONTINUE READING