Laser energy limitation for buried metal cuts

@article{Bernstein1998LaserEL,
  title={Laser energy limitation for buried metal cuts},
  author={J. B. Bernstein and Yijia Hua and Wei Zhang},
  journal={IEEE Electron Device Letters},
  year={1998},
  volume={19},
  pages={4-6}
}
Redundancy by laser cutting of polysilicon fuses has been used by the memory industry for many years. As the levels of metallization increase, it becomes more difficult and expensive to delete deeply buried polysilicon lines. Ideally, metal fuses will be cut exclusively. However, to achieve reliable metal line cutting, a wide process window has to be found that can cut buried metal lines. The upper energy limit has previously been thought to result from excess laser energy absorbed by the… CONTINUE READING

From This Paper

Figures, tables, and topics from this paper.
6 Citations
9 References
Similar Papers

References

Publications referenced by this paper.
Showing 1-9 of 9 references

Laser linking of metal interconnect: Analysis and design considerations

  • Y. L. Shen, S. Suresh, J. B. Bernstein
  • IEEE Trans. Electron Devices,vol. 43, pp. 402–410…
  • 1996
1 Excerpt

Laser linking of metal interconnect: Linking dynamics and failure analysis

  • R. L. Rasera, J. B. Bernstein
  • IEEE Trans. Comp., Packag., Manufact. Technol. A…
  • 1996
1 Excerpt

Laser-formed metallic connections employing a lateral link structure

  • J. B. Bernstein, B. D. Colella
  • IEEE Trans. Comp., Packag., Manufact. Technol. A…
  • 1995
1 Excerpt

Optimization of memory redundancy laser link processing

  • Y. Sun, R. Harris, E. Swenson, C. Hutchens
  • SPIE, vol. 2636, pp. 152–164, 1995.
  • 1995
2 Excerpts

High-density laser linking of metal interconnect,”IEEE

  • J. B. Bernstein, T. M. Ventura, A. T. Radomski
  • Trans. Comp., Packag., Manufact. Technol.,vol
  • 1994

Computer-simulated explosion of poly-silicide links in laser-programmable redundancy for VLSI memory repair

  • J. D. Chlipala, L. M. Scarfone, C. Y. Lu
  • IEEE Trans. Electron Devices, vol. 36, pp. 2433…
  • 1989
1 Excerpt

Laser programmable redundancy and yield improvement in a 64 K DRAM

  • J. D. Chlipala
  • IEEE J . Solid - State Circuits
  • 1981

Laser programmable redundancy and yield improvement in a 64K DRAM,”IEEE

  • R. T. Smith, J. D. Chlipala
  • J. Solid-State Circuits, vol
  • 1981
2 Excerpts

High - density laser linking of metal interconnect

  • T. M. Ventura J. B. Bernstein, A. T. Radomski
  • IEEE Trans . Comp . , Packag . , Manufact…

Similar Papers

Loading similar papers…