Laser beam periodic-dot writing for fabrication of Ti:LiNbO(3) waveguide wavelength filters.


A new laser beam (LB) writing technique that can provide dot lines of a nearly 10-µm period in photoresist, with a period fluctuation of less than 4 nm, is proposed and demonstrated. The dot period is also controllable with an accuracy of the order of a nanometer. The so-called LB periodic-dot writing has been successfully applied for definition of… (More)
DOI: 10.1364/AO.33.002317


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