Laser-based fabrication of polymer micropump

@inproceedings{Kim2004LaserbasedFO,
  title={Laser-based fabrication of polymer micropump},
  author={Joohan Kim and Xianfan Xu},
  year={2004}
}
Joohan Kim Xianfan Xu Purdue University School of Mechanical Engineering West Lafayette, Indiana 47907 E-mail: xxu@ecn.purdue.edu Abstract. Diffuser micropumps are commonly fabricated using the standard lithography techniques with silicon as the base material. The important components of this type of micropumps are flow-directing diffusers and a moving diaphragm. Different diffuser designs show various flow rates and pump efficiency. In this work a polymer is used as the base material instead… CONTINUE READING

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