Laser-assisted nanofabrication in the scanning electron microscope

  title={Laser-assisted nanofabrication in the scanning electron microscope},
  author={Gregory A. Magel and Nicholas A. Roberts and Jason D. Fowlkes and Philip D. Rack and Carolyn Hartfield and Tricia Moore},
  journal={2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO)},
A prototype apparatus was developed to deliver up to ~300 kW/cm2 of cw or pulsed near IR light to a sample inside a scanning electron microscope (SEM) or focused ion beam (FIB) instrument. Transient heating of localized areas around the electron or ion beam can be performed with fine control of power and pulse parameters, down to sub-microsecond durations. In conjunction with a gas injection system, electron beam induced deposition (EBID) of enhanced purity Pt and Au structures was demonstrated… CONTINUE READING

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