Laser- and Heavy Ion-Induced Charge Collection in Bulk FinFETs

  title={Laser- and Heavy Ion-Induced Charge Collection in Bulk FinFETs},
  author={Farah El-Mamouni and E. X. Zhang and N. D. Pate and Nicholas C. Hooten and R. D. Schrimpf and R. A. Reed and K. F. Galloway and Dale Mcmorrow and Jeffrey H. Warner and Eddy Simoen and Cor Claeys and Alessio Griffoni and Dimitri Linten and Gyorgy Vizkelethy},
  journal={IEEE Transactions on Nuclear Science},
Through-wafer two-photon absorption laser experiments were performed on bulk FinFETs. Transients show distinct signatures for charge collection from drift and diffusion, demonstrating the contribution of charge generated in the substrate to the charge collection process. This result was validated through heavy ion testing on more advanced bulk FinFETs with fin widths as narrow as 5 nm. The drain region dominates the charge collection, with as much as 45 fC of charge collected in the drain… CONTINUE READING
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