Laser-Microstructured ZnO/p-Si Photodetector with Enhanced and Broadband Responsivity across the Ultraviolet–Visible–Near-Infrared Range

  title={Laser-Microstructured ZnO/p-Si Photodetector with Enhanced and Broadband Responsivity across the Ultraviolet–Visible–Near-Infrared Range},
  author={Georgios Chatzigiannakis and Angelina Jaros and Renaud Leturcq and J{\"o}rgen Jungclaus and Tobias Voss and Spyros Gardelis and Maria Kandyla},
  journal={arXiv: Applied Physics},
We develop ZnO/p-Si photodetectors by atomic layer deposition (ALD) of ZnO thin films on laser-microstructured silicon and we investigate their electrical and optical behavior, demonstrating high sensitivity and broadband operation. Microstructured p-type silicon was obtained by ns-laser irradiation in SF6 gas, which results in the formation of quasi-ordered and uniform microspikes on the silicon surface. The irradiated silicon contains sulfur impurities, which extend its absorbance to the near… 

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