Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire ( cAl 2 O 3 )

Abstract

Laser-induced-plasma-assisted ablation (LIPAA) is a promising micro-machining method that can fabricate microstructure on hard and transparent double-polished single crystal sapphire (SCS). While ablating, a nanosecond pulse 1064 nm wavelength laser beam travels through the SCS substrate and bombards the copper target lined up behind the substrate, which… (More)

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