Large tuning range analog and multi-bit MEMS varactors


This paper presents a variety of analog and multi-bit RF MEMS varactors for use in tunable circuits and filters. Novel use of multiple pull-down electrodes covered with thick dielectrics allow for analog and digital-type control and long-hold down times. An analog varactor with nearly 7:1 usable tuning range and better than 80:1 switching range, a multi… (More)


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