Large-scale two-dimensional MoS₂ photodetectors by magnetron sputtering.


We report on the demonstration of photodetectors based on large scale two-dimensional molybdenum disulfide (MoS2) transition metal dichalcogenides. Excellent film uniformity and precise control of the MoS2 thickness down to a monolayer (~0.75nm) were achieved by magnetron sputtering synthesis approach. In particular, the photodetectors integrated with five MoS2 monolayers exhibit a high photoresponsivity of 1.8 A/W, an external quantum efficiency exceeding 260%, and a photodetectivity of ~5 x 10(8) Jones for a wavelength of 850 nm, surpassing the performance of mechanically exfoliated based photodetectors.

DOI: 10.1364/OE.23.013580

Cite this paper

@article{Ling2015LargescaleTM, title={Large-scale two-dimensional MoS₂ photodetectors by magnetron sputtering.}, author={Zhiheng Ling and Rongrong Yang and J. W. Chai and Shu-lian Wang and Wei Sun Leong and Yao Tong and D N Lei and Qin Zhou and X Gong and Dong Zhi Chi and K-W Ang}, journal={Optics express}, year={2015}, volume={23 10}, pages={13580-6} }