Large range nanopositioning stage design: A three-layer and two-stage platform

@inproceedings{Torralba2016LargeRN,
  title={Large range nanopositioning stage design: A three-layer and two-stage platform},
  author={Marta Torralba and Margarita Valenzuela and Jos{\'e} Antonio Yag{\"u}e-Fabra and Jos{\'e} Antonio Albajez and Juan Jos{\'e} Aguilar},
  year={2016}
}
Abstract In this article, a novel two-dimensional nanopositioning platform (NanoPla) design is described. Its requirements are not only sub-micrometer accuracy for nanotechnology applications, but also long working range ( XY -motion 50 mm × 50 mm). These features increase the common range operation of devices for nanotechnology issues (e.g. an atomic force microscope), and the number of potential metrological applications: positioning for manufacturing, manipulation or sample characterization… CONTINUE READING

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