Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method

@article{Veijola2000LargedisplacementMA,
  title={Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method},
  author={T. Veijola and Terhi Mattila and O. Jaakkola and Jyrki Kiihamaki and T. Lamminmaki and Alexander Oja and K. Ruokonen and Heikki Sepp{\"a} and Pentti Sepp{\aa}l{\aa} and Ilkka Tittonen},
  journal={2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017)},
  year={2000},
  volume={1},
  pages={99-102 vol.1}
}
Nonlinearities in electrostatically driven micromechanical resonators are studied with circuit simulations. Models for the resonators are built of elementary electrical equivalent-circuit blocks constructed of nonlinear voltage-controlled current and charge sources. They are simulated with the harmonic balance method in the RF-simulation program APLAC. Spring softening effects due to the capacitive transducer and spring hardening effects due to the resonator's third order spring coefficient are… CONTINUE READING

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