Large dielectric constant (ε/ε0>6000) Ba0.4Sr0.6TiO3 thin films for high-performance microwave phase shifters

@inproceedings{Carlson2000LargeDC,
  title={Large dielectric constant (ε/ε0>6000) Ba0.4Sr0.6TiO3 thin films for high-performance microwave phase shifters},
  author={Chris M. Carlson and T. V. Rivkin and Philip A. Parilla and John D. Perkins and David S. Ginley and Andrey B. Kozyrev and V. N. Oshadchy and A. S. Pavlov},
  year={2000}
}
  • Chris M. Carlson, T. V. Rivkin, +5 authors A. S. Pavlov
  • Published 2000
  • Physics, Materials Science
  • We deposited epitaxial Ba0.4Sr0.6TiO3 (BST) films via laser ablation on MgO and LaAlO3 (LAO) substrates for tunable microwave devices. Postdeposition anneals (∼1100 °C in O2) improved the morphology and overall dielectric properties of films on both substrates, but shifted the temperature of maximum dielectric constant (Tmax) up for BST/LAO and down for BST/MgO. These substrate-dependent Tmax shifts had opposite effects on the room-temperature dielectric properties. Overall, BST films on MgO… CONTINUE READING

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