Large area micro hot embossing of Pyrex glass with GC mold machined by dicing

@article{Takahashi2005LargeAM,
  title={Large area micro hot embossing of Pyrex glass with GC mold machined by dicing},
  author={Masaharu Takahashi and Yoichi Murakoshi and Ryutaro Maeda and Kouhei Hasegawa},
  journal={Microsystem Technologies},
  year={2005},
  volume={13},
  pages={379-384}
}
Micro/Nano imprinting or hot embossing is currently a target of interest for industrial production of micro and Nano devices for the low cost aspect. In Fluidic MEMS (Micro Electromechanical Systems) applications, polymer materials have been widely employed for their low cost to fabricate the economical products (Becker and Heim in Sens Acuators A 83:120–135, 2000; Becker and Gaertner in Mol Biotechnol 82:89–99, 2001). However glasses are much more suitable for the higher temperature… CONTINUE READING