Large Stroke Electrostatic Comb-drive Actuators Based on a Novel Flexure Mechanism

This paper presents in-plane electrostatic comb-drive actuators with stroke as large as 245 μm that is achieved by employing a novel Clamped Paired Double Parallelogram (C-DPDP) flexure mechanism. For a given flexure beam length, comb gap, and actuation voltage, this is currently the largest comb-drive actuator stroke reported in the literature. The C-DP-DP… CONTINUE READING