Large-Scale Semiconductor Process Fault Detection Using a Fast Pattern Recognition-Based Method

@article{He2010LargeScaleSP,
  title={Large-Scale Semiconductor Process Fault Detection Using a Fast Pattern Recognition-Based Method},
  author={Q. Peter He and Jin Wang},
  journal={IEEE Transactions on Semiconductor Manufacturing},
  year={2010},
  volume={23},
  pages={194-200}
}
Fault detection and classification (FDC) has been recognized as an integral component of the advanced process control (APC) framework in the semiconductor industry, as it helps to improve overall equipment efficiency (OEE). However, some unique characteristics of semiconductor manufacturing processes have posed challenges for FDC applications, such as nonlinearity in most batch processes, and multimodal batch trajectories due to product mix. To explicitly account for these unique… CONTINUE READING
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