Landscape for semiconductor analysis: Issues and challenges

Abstract

This paper summarizes the landscape for semiconductor analysis. High-resolution imaging and microanalysis are discussed first because they are used in most of the core process technologies that enable device scaling beyond the current 30 nm technology node. Key technology for analysis of dopant distribution, contamination, and strain is reviewed from the… (More)

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Cite this paper

@article{Kim2011LandscapeFS, title={Landscape for semiconductor analysis: Issues and challenges}, author={Kinam Kim and Gyeong-Su Park}, journal={18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)}, year={2011}, pages={1-9} }