Kinetic investigation of the planar multipole resonance probe in the low-pressure plasma

@article{Wang2021KineticIO,
  title={Kinetic investigation of the planar multipole resonance probe in the low-pressure plasma},
  author={Chunjie Wang and Michael Friedrichs and Jens Oberrath and Ralf Peter Brinkmann},
  journal={Plasma Sources Science and Technology},
  year={2021},
  volume={30}
}
Active Plasma Resonance Spectroscopy (APRS) is a well-established plasma diagnostic method: a radio frequency signal is coupled into the plasma via a probe or antenna, excites it to oscillate, and the response is evaluated through a mathematical model. The majority of APRS probes are invasive and perturb the plasma by their physical presence. The planar multipole resonance probe (pMRP) solves this problem: it can be integrated into the chamber wall and minimize the perturbation. Previous work… Expand

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