Kinetic investigation of the planar multipole resonance probe in the low-pressure plasma

  title={Kinetic investigation of the planar multipole resonance probe in the low-pressure plasma},
  author={Chunjie Wang and Michael Friedrichs and Jens Oberrath and Ralf Peter Brinkmann},
  journal={Plasma Sources Science and Technology},
Active Plasma Resonance Spectroscopy (APRS) is a well-established plasma diagnostic method: a radio frequency signal is coupled into the plasma via a probe or antenna, excites it to oscillate, and the response is evaluated through a mathematical model. The majority of APRS probes are invasive and perturb the plasma by their physical presence. The planar multipole resonance probe (pMRP) solves this problem: it can be integrated into the chamber wall and minimize the perturbation. Previous work… 

Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation

As the conventional voltage and current (VI) probes widely used in plasma diagnostics have separate voltage and current sensors, crosstalk between the sensors leads to degradation of measurement

Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics

As the importance of measuring electron density has become more significant in the material fabrication industry, various related plasma monitoring tools have been introduced. In this paper, the



The spherical multipole resonance probe: kinetic damping in its spectrum

  • J. Oberrath
  • Physics
    Plasma Sources Science and Technology
  • 2020
The multipole resonance probe is one of the more recently developed measurement devices to measure plasma parameters like electron density and temperature based on the concept of active plasma

The multipole resonance probe: A concept for simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure plasmas

A diagnostic concept is presented which enables the simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure gas discharges. The proposed method utilizes

Influence of kinetic effects on the spectrum of a parallel electrode probe

Active plasma resonance spectroscopy (APRS) denotes a class of diagnostic techniques which utilize the natural ability of plasmas to resonate on or near the electron plasma frequency ωp. One

Kinetic damping in the spectra of the spherical impedance probe

The impedance probe is a measurement device to measure plasma parameters, such as electron density. It consists of one electrode connected to a network analyzer via a coaxial cable and is immersed

Modeling and simulation of the plasma absorption probe

The plasma absorption probe (PAP) was invented as an economical and robust diagnostic device to determine the electron density distribution in technical plasmas. It consists of a small antenna

A simple and straightforward expression for curling probe electron density diagnosis in reactive plasmas

Active plasma resonance spectroscopy (APRS) refers to the family of plasma diagnostic methods which utilize the ability of plasmas to resonate at frequencies close to the plasma frequency. APRS

Active plasma resonance spectroscopy: a functional analytic description

The term ‘active plasma resonance spectroscopy’ denotes a class of diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. The basic idea dates back to the

Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas

In this paper, we describe a novel and simple technique for measuring electron density using a plasma absorption probe (PAP). PAP enables us to measure the local absolute electron density even when

The Planar Multipole Resonance Probe: Challenges and Prospects of a Planar Plasma Sensor

A novel compact plasma sensor applicable for the supervision and control of industrial plasma processes is presented in this contribution and the suitability of the pMRP for monitoring purposes is proven.

The hairpin resonator: A plasma density measuring technique revisited

A microwave resonator probe is a resonant structure from which the relative permittivity of the surrounding medium can be determined. Two types of microwave resonator probes (referred to here as