Keynote lecture 3: “MEMS as tools for nanotechnology”

  • Urs Staufer
  • Published 2009 in
    2009 4th IEEE International Conference on Nano…

Abstract

In Nanoscience, individual, nanometer size objects are prepared to create a specific functionality, which shall then be investigated. The interaction with the object during the preparation or investigation has to be focused to a very small location. This can be achieved by either using very specific, chemical reactions, which can “tackle” the… (More)

Cite this paper

@article{Staufer2009KeynoteL3, title={Keynote lecture 3: “MEMS as tools for nanotechnology”}, author={Urs Staufer}, journal={2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems}, year={2009}, pages={xxvi-xxvii} }