Iterative tuning of feedforward controller with force ripple compensation for wafer stage

@article{Stearns2008IterativeTO,
  title={Iterative tuning of feedforward controller with force ripple compensation for wafer stage},
  author={Hoday Stearns and Sandeep Mishra and Masayoshi Tomizuka},
  journal={2008 10th IEEE International Workshop on Advanced Motion Control},
  year={2008},
  pages={234-239}
}
Iterative controller tuning is a method to fine-tune controllers in a repetitive process using only data collected in experiment runs. The controller parameters are chosen so as to minimize a certain cost function. The values of the parameters are updated iteratively based on tracking error in a gradient search. Iterative controller tuning is an advantageous method of controller tuning because no prior plant model is necessary. In this paper, we iteratively tune the feedforward controller of a… CONTINUE READING
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