Iterative procedure for in-situ EUV optical testing with an incoherent source

  title={Iterative procedure for in-situ EUV optical testing with an incoherent source},
  author={Ryan H. Miyakawa and Patrick P. Naulleau},
We propose an iterative method for in-situ optical testing under partially coherent illumination that relies on the rapid computation of aerial images. In this method a known pattern is imaged with the test optic at several planes through focus. A model is created that iterates through possible aberration maps until the through-focus series of aerial images matches the experimental result. The computation time of calculating the through-focus series is significantly reduced by a-SOCS, an… CONTINUE READING


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