Iterative procedure for in-situ EUV optical testing with an incoherent source

@inproceedings{Miyakawa2009IterativePF,
  title={Iterative procedure for in-situ EUV optical testing with an incoherent source},
  author={Ryan H. Miyakawa and Patrick P. Naulleau},
  year={2009}
}
We propose an iterative method for in-situ optical testing under partially coherent illumination that relies on the rapid computation of aerial images. In this method a known pattern is imaged with the test optic at several planes through focus. A model is created that iterates through possible aberration maps until the through-focus series of aerial images matches the experimental result. The computation time of calculating the through-focus series is significantly reduced by a-SOCS, an… CONTINUE READING

References

Publications referenced by this paper.
Showing 1-3 of 3 references

Fast optical and process proximity correction algorithms for integrated circuit manufacturing

  • N. B. Cobb
  • Ph.D. dissertation
  • 1998
Highly Influential
3 Excerpts

Journal of Statistical Physics

  • S. Kirpatrick
  • Volume 34, Numbers 5-6 / March
  • 1984
Highly Influential
3 Excerpts

K

  • P. P. Naulleau
  • A. Goldberg, et al., Applied Optics 38 (35), 7252…
  • 1999
2 Excerpts

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