Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation

@article{Tien2005IterativeCO,
  title={Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation},
  author={Szuchi Tien and Qingze Zou and Santosh Devasia},
  journal={IEEE Transactions on Control Systems Technology},
  year={2005},
  volume={13},
  pages={921-931}
}
This paper addresses the compensation of the dynamics-coupling effect in piezoscanners used for positioning in atomic force microscopes (AFMs). Piezoscanners are used to position the AFM probe, relative to the sample, both parallel to the sample surface (x and y axes) and perpendicular to the sample surface (z axis). In this paper, we show that dynamics-coupling from the scan axes (x and y axes) to the perpendicular z axis can generate significant positioning errors during high-speed AFM… CONTINUE READING

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