Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films

@article{Gu2016IonbombardmentinducedRI,
  title={Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films},
  author={Zhiqing Gu and Jiafu Wang and Chaoquan Hu and Xiaobo Zhang and Jianchen Dang and Senfu Zhang and Jing Gao and Xiaoyi Wang and Hong Chen and Wenjun Zheng},
  journal={Applied Physics A},
  year={2016},
  volume={122},
  pages={1-10}
}
Although the role of ion bombardment on electrical conductivity and optical reflectivity of transition metal nitrides films was reported previously, the results were controversial and the mechanism was not yet well explored. Here, we show that proper ion bombardment, induced by applying the negative bias voltage (Vb), significantly improves the electrical conductivity and optical reflectivity in rocksalt hafnium nitride films regardless of level of stoichiometry (i.e., in both near… CONTINUE READING
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