Corpus ID: 133678129

Investigation of space sheaths at electrodes in an RF discharge

@inproceedings{Godyak1977InvestigationOS,
  title={Investigation of space sheaths at electrodes in an RF discharge},
  author={Valery Godyak and Oleg A. Popov and Amal H. Hanna},
  year={1977}
}
  • Valery Godyak, Oleg A. Popov, Amal H. Hanna
  • Published 1977
  • Materials Science
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