Investigation of nanocrystalline diamond films as UV transparent Ohmic contacts to GaN

@article{Tadjer2007InvestigationON,
  title={Investigation of nanocrystalline diamond films as UV transparent Ohmic contacts to GaN},
  author={M. J. Tadjer and K. D. Hobart and J. D. Caldwell and M. Mastro and T. Feygelson and J. E. Butler and D. A. Alexson and F. J. Kub},
  journal={2007 International Semiconductor Device Research Symposium},
  year={2007},
  pages={1-2}
}
Nanocrystalline diamond (NCD) thin films are of interest due to their large bandgap and excellent thermal properties, which make them attractive for power device applications. The UV transparency of NCD films has been previously reported on Si and glass substrates. In addition, it has been demonstrated that NCD films grown on 4H-SiC exhibit a nearly ideal Schottky contact behavior. In this paper, the electrical contact properties of NCD films on GaN are investigated.