Investigation of Multimodal Electret-Based MEMS Energy Harvester With Impact-Induced Nonlinearity


This paper presents an electret-based MEMS energy harvester synergizing the advantages of multi-modal structure and impact mechanism for broad operating bandwidth. The device with a volume of 295 mm3 comprises an electret-based primary subsystem for power generation and an electrode-free auxiliary subsystem for frequency tuning. The tiny auxiliary subsystem… (More)


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