Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz

@article{Pop2018InvestigationOE,
  title={Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz},
  author={Flavius V. Pop and A. Kochhar and Gabriel Vidal-{\'A}lvarez and G. Piazza},
  journal={Journal of Microelectromechanical Systems},
  year={2018},
  volume={27},
  pages={407-413}
}
  • Flavius V. Pop, A. Kochhar, +1 author G. Piazza
  • Published 2018
  • Physics
  • Journal of Microelectromechanical Systems
    • In this paper we present laterally vibrating resonators (LVRs) based on X-cut lithium niobate (LN) exhibiting a maximum quality factor <inline-formula> <tex-math notation="LaTeX">$({Q})$ </tex-math></inline-formula> around 1200 and an electromechanical coupling (<inline-formula> <tex-math notation="LaTeX">$k_{t}^{2}$ </tex-math></inline-formula>) of 30%. This paper shows how the highest <inline-formula> <tex-math notation="LaTeX">$k_{t}^{2}$ </tex-math></inline-formula> ever attained in X-cut… CONTINUE READING
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    References

    SHOWING 1-10 OF 17 REFERENCES
    Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators
    • S. Gong, G. Piazza
    • Materials Science
    • 2012 International Electron Devices Meeting
    • 2012
    • 11
    Multi-frequency LiNbo3 Lamb wave resonators with < 3Ω impedance
    • 12
    Investigations on quality factor of high frequency laterally vibrating LN on SiO2 microresonators
    • 3
    Active reflectors for high performance lithium niobate on silicon dioxide resonators
    • Lisha Shi, G. Piazza
    • Materials Science
    • 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    • 2015
    • 7
    Integration of bottom electrode in Y-cut lithium niobate thin films for high electromechanical coupling and high capacitance per unit area MEMS resonators
    • 10
    A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication
    • 72
    5 Ghz lithium niobate MEMS resonators with high FoM of 153
    • Y. Yang, A. Gao, R. Lu, S. Gong
    • Materials Science
    • 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
    • 2017
    • 38
    Elimination of Spurious Modes in SH0 Lithium Niobate Laterally Vibrating Resonators
    • 25
    High electromechanical coupling MEMS resonators at 530 MHz using ion sliced X-cut LiNbO3 thin film
    • 21
    Modified Butterworth-Van Dyke circuit for FBAR resonators and automated measurement system
    • 383