Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz

@article{Pop2018InvestigationOE,
  title={Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz},
  author={Flavius V. Pop and A. Kochhar and Gabriel Vidal-{\'A}lvarez and G. Piazza},
  journal={Journal of Microelectromechanical Systems},
  year={2018},
  volume={27},
  pages={407-413}
}
  • Flavius V. Pop, A. Kochhar, +1 author G. Piazza
  • Published 2018
  • Physics
  • Journal of Microelectromechanical Systems
  • In this paper we present laterally vibrating resonators (LVRs) based on X-cut lithium niobate (LN) exhibiting a maximum quality factor <inline-formula> <tex-math notation="LaTeX">$({Q})$ </tex-math></inline-formula> around 1200 and an electromechanical coupling (<inline-formula> <tex-math notation="LaTeX">$k_{t}^{2}$ </tex-math></inline-formula>) of 30%. This paper shows how the highest <inline-formula> <tex-math notation="LaTeX">$k_{t}^{2}$ </tex-math></inline-formula> ever attained in X-cut… CONTINUE READING
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