Investigate on Characteristics of Gas Film Damping of Capacitive Micro Accelerometers

Abstract

Basing on the rarefied gas dynamics theory and the squeeze film Reynolds equation amended with slip flow boundary condition, the gas film damping effects on the sensitive proof mass, moving along its axial direction, are analyzed for capacitive micro accelerometers. Simplified analysis solutions are obtained for damping force and damping coefficient. Also… (More)

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