Invertible Neural Networks versus MCMC for Posterior Reconstruction in Grazing Incidence X-Ray Fluorescence

@inproceedings{Andrle2021InvertibleNN,
  title={Invertible Neural Networks versus MCMC for Posterior Reconstruction in Grazing Incidence X-Ray Fluorescence},
  author={Anna Andrle and Nando Farchmin and Paul Hagemann and Sebastian Heidenreich and Victor Soltwisch and Gabriele Steidl},
  booktitle={SSVM},
  year={2021}
}
Grazing incidence X-ray fluorescence is a non-destructive technique for analyzing the geometry and compositional parameters of nanostructures appearing e.g. in computer chips. In this paper, we propose to reconstruct the posterior parameter distribution given a noisy measurement generated by the forward model by an appropriately learned invertible neural network. This network resembles the transport map from a reference distribution to the posterior. We demonstrate by numerical comparisons that… 
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7 Citations

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