International Standards on Calibration of XPS and AES Spectrometer

@inproceedings{Hashimoto2003InternationalSO,
  title={International Standards on Calibration of XPS and AES Spectrometer},
  author={Satoshi Hashimoto},
  year={2003}
}
International standards of XPS and AES spectrometers have been established. Binding energy scale calibration for XPS spectrometers was standardized as ISO 15472. The calibration of kinetic energy scale for AES spectrometers was standardized as ISO 17973 and 17974. The calibrations for the intensity scale are now discussing. The calibrations for the XPS and AES spectrometers were reviewed. The standard for XPS spectrometers specifies the calibration methods to estimate uncertainty with 95… CONTINUE READING

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