Internal Dielectric Transduction in Bulk-Mode Resonators

  title={Internal Dielectric Transduction in Bulk-Mode Resonators},
  author={Dana Weinstein and S. A. Bhave},
  journal={Journal of Microelectromechanical Systems},
This paper investigates electrostatic transduction of a longitudinal-mode silicon acoustic resonator with internal dielectric films. Geometric optimization of internal dielectrically transduced resonators is derived analytically and shown experimentally. Analysis of internal dielectric transduction shows a maximum transduction efficiency with thin dielectric films at points of maximum strain of the desired resonant mode. With this design optimization, a silicon bar resonator is realized with a… CONTINUE READING
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