Interferometric detection in picosecond ultrasonics for nondestructive testing of submicrometric opaque multilayered samples: TiN/AlCu/TiN/Ti/Si

@article{Rossignol2005InterferometricDI,
  title={Interferometric detection in picosecond ultrasonics for nondestructive testing of submicrometric opaque multilayered samples: TiN/AlCu/TiN/Ti/Si},
  author={Cl{\'e}ment Rossignol and Bernard Perrin},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2005},
  volume={52},
  pages={1354-1359}
}
An experimental investigation of nanometric thin films by a picosecond ultrasonic technique is presented. A photoelastic model is used with an interferometric device, combined with ultrafast optical pump and probe setup, to measure the thicknesses of submicrometric layers made of TiN, Ti, and AlCu deposited on silicon (Si) wafers. The results are in good agreement with ellipsometry measurements showing that the picosecond ultrasonic technique can give accurate results even when the reflectance… CONTINUE READING