Interaction of low-energy oxygen ions with the Si(100) surface.

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@article{Chung1992InteractionOL, title={Interaction of low-energy oxygen ions with the Si(100) surface.}, author={H Chung and Baek and Kim and Yeom and Jeong and Shin}, journal={Physical review. B, Condensed matter}, year={1992}, volume={45 4}, pages={1705-1711} }