Intelligent search method for the optimal design of a clean room robot manipulator

Abstract

The paper presents the use of an artificial intelligence technique dedicated to find the near optimal design of a robot manipulator which transfers silicon wafers for the electronic manufacturing. This task requires the manipulator to move as smooth as possible. The environment where the manipulator works must be free from airborne particles that are able… (More)
DOI: 10.1109/ENC.2004.1342613

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