Intelligent monitoring and control of semiconductor manufacturing equipment


The use of AI methods to monitor and control semiconductor fabrication in a state-of-the-art manufacturing environment called the Rapid Thermal Multiprocessor is described. Semiconductor fabrication involves many complex processing steps with limited opportunities to measure process and product properties. By applying additional process and product… (More)
DOI: 10.1109/64.108948


13 Figures and Tables

Slides referencing similar topics