Integration of silicon photonics into DRAM process

  title={Integration of silicon photonics into DRAM process},
  author={D. J. Shin and Kyuheon Cho and H. C. Ji and Byoungho Lee and S. G. Kim and Jinkwon Bok and S. H. Choi and YongJu Shin and J H Kim and S. Y. Lee and Kwansik Cho and B. J. Kuh and Joonghan Shin and J. S. Lim and Jongsoo Kim and H. M. Choi and Kyoungho Ha and Y. D. Park and C. H. Chung},
  journal={2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC)},
We present an electro-photonic circuit integrated into a 65-nm DRAM periphery process. Its photonic circuit features 2-dB/mm waveguide, 7-dB grating coupler, 10-Gb/s modulator, and 5-Gb/s Ge photodiode.