Integration of individual TiO2 nanotube on the chip: Nanodevice for hydrogen sensing

  title={Integration of individual TiO2 nanotube on the chip: Nanodevice for hydrogen sensing},
  author={M. Enachi and O. Lupan and T. Braniste and A. Sarua and Lee Chow and Y. Mishra and Dawit Gedamu and R. Adelung and I. Tiginyanu},
  journal={Physica Status Solidi-rapid Research Letters},
  • M. Enachi, O. Lupan, +6 authors I. Tiginyanu
  • Published 2015
  • Materials Science
  • Physica Status Solidi-rapid Research Letters
  • Titania (TiO2) exists in several phases possessing different physical properties. In view of this fact, we report on three types of hydrogen sensors based on individual TiO2 nanotubes (NTs) with three different structures consisting of amorphous, anatase or anatase/rutile mixed phases. Different phases of the NTs were produced by controlling the temperature of post-anodization thermal treatment. Integration of individual TiO2 nanotubes on the chip was performed by employing metal deposition… CONTINUE READING
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