Integration of a carbon nanotube based electrode in silicon microtechnology to fabricate electrochemical transducers.

Abstract

An original approach was developed and validated for the fabrication of a carbon nanotube (CNT) electrode synthesized directly onto a carbon buffer thin film deposited on a highly doped monocrystalline silicon surface. The buffer layer of amorphous carbon thin film was deposited by physical vapour deposition on the silicon substrate before CNT synthesis… (More)
DOI: 10.1088/0957-4484/19/43/435502

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