Integration of MOSFET Transistors in MEMS Resonators for Improved Output Detection

@article{Grogg2007IntegrationOM,
  title={Integration of MOSFET Transistors in MEMS Resonators for Improved Output Detection},
  author={D. Grogg and Dimitrios Tsamados and N. D. Badila and A. M. Ionescu},
  journal={TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2007},
  pages={1709-1712}
}
Micro-electromechanical (MEM) laterally vibrating square resonators and beams, fabricated via a prototyping technology combining FIB-micromachined gaps with conventional UV lithography in 1.35 mum thick SOI are presented. Resonators with both capacitive and MOSFET detection and gaps of ~100 nm are demonstrated. Resonance frequencies of 32 MHz and 13 MHz were measured for squares and beams, respectively. The square shaped resonators have Q-factors in the order of 4000. This paper reports on a… CONTINUE READING
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