Integration of Heterogeneous MEMS and RF Systems as an Enabling Technology for Unobtrusive Ambient Intelligence

Abstract

Within last few decades the electronic industry has grew up to the vast, most complex area. The most developed technologies are those related to photolithographic microfabrication on planar substrates. Essentially they were based on experiences originated from manufacturing of integrated circuits. Integration of different 3-D elements with electronic… (More)

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