Integrated wide-angle scanner based on translating a curved mirror of acylindrical shape.

Abstract

A wide angle microscanning architecture is presented in which the angular deflection is achieved by displacing the principle axis of a curved silicon micromirror of acylindrical shape, with respect to the incident beam optical axis. The micromirror curvature is designed to overcome the possible deformation of the scanned beam spot size during scanning. In… (More)
DOI: 10.1364/OE.21.013906

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