Integrated ultra-thin-film gas sensors

Abstract

The fabrication and performance of an ultra-thin-film integrated gas sensor for detecting impurities in semiconductor process gases are described. Detector responses are based on gas-induced resistance changes in an ultra-thin Ti-P film mounted on a thin dielectric window supported by a silicon rim. The window temperature can be shifted several hundred… (More)

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Cite this paper

@inproceedings{Johnson2011IntegratedUG, title={Integrated ultra-thin-film gas sensors}, author={C. L. Johnson and J. W. Schwank}, year={2011} }