Integrated tuning fork nanocavity optomechanical transducers with high fMQM product and stress-engineered frequency tuning

@article{Zhang2015IntegratedTF,
  title={Integrated tuning fork nanocavity optomechanical transducers with high fMQM product and stress-engineered frequency tuning},
  author={R. Zhang and Chaoyang Ti and Marcelo Davanco and Y. Ren and Vladimir A. Aksyuk and Y Y Liu and Kartik Srinivasan},
  journal={Applied Physics Letters},
  year={2015},
  volume={107},
  pages={131110}
}
Cavity optomechanical systems are being widely developed for precision force and displacement measurements. For nanomechanical transducers, there is usually a trade-off between the frequency (fM) and quality factor (QM), which limits temporal resolution and sensitivity. Here, we present a monolithic cavity optomechanical transducer supporting both high fM and high QM. By replacing the common doubly clamped, Si3N4 nanobeam with a tuning fork geometry, we demonstrate devices with the fundamental… 

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