Integrated tracking and focusing systems in a monolithic device for MEMS optical pick-up head

This work proposed a novel optical pickup head with tracking and focusing system in a monolithic device. The device was fabricated by poly-Si trench-refilled technology and used UV polymer droplet as objective lens. In-plane (tracking) and out-of-plane (focusing) motion were decoupled by springs, gimbal structure, and actuators. In results, we successfully… CONTINUE READING