Integrated topology and shape optimization software for compliant MEMS mechanism design


The objective of this work is to develop a specialized integrated design tool for MEMS compliant mechanisms from topology to shape optimization. We use the topology optimization technology to obtain an optimal mechanism layout achieving the best overall system performance. This design process is followed by shape optimization to improve stress-based local… (More)
DOI: 10.1016/j.advengsoft.2006.12.003


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