Integrated intelligent optimized dynamic scheduling of semiconductor fabrication facilities

  • Li Li, Fei Qiao
  • Published 2010 in
    2010 IEEE International Conference on Automation…

Abstract

Semiconductor wafer fabrication facilities (fabs) cry for optimized dynamic scheduling approach due to its high uncertainty and complexity. A novel intelligent optimized dynamic scheduling method, integrating intelligent sequencing with dynamic dispatching, is proposed (abbreviated as ODC). ODC includes three sub-algorithms, i.e., a Partheno-Genetic… (More)

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